APCOT is devoted to all aspects of solid-state sensors, microactuators, microsystems enabled by MEMS and Nano technologies. APCOT2010 will be hosted by The University of Western Australia, Perth, Australia on July 6-9, 2010. Papers describing significant advances in the state-of-the-art of scientific results and understanding in the areas covered by the conference will be presented. The official proceedings of the meeting will consist of selected papers that are peer reviewed and published as special-issue of the journals Sensors and Actuators A, and Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3).