This conference provides the opportunity for in-depth communication and networking between researchers and developers in smart materials, smart structures, smart micro- and nanoelectronics devices and systems, nano- and microtechnology with special emphasis on packaging and integration of MEMS and NEMS for diverse application areas. These fields are multidisciplinary and make extensive use of micro- and nanofabrication technologies. Exciting new developments exist in nanomaterials, sensors and actuators, as well as in the design and application of these systems and these will be highlighted in the meeting.