ARC Nanotechnology Network

Excimer laser facility

Nanotechnology Capabilities:

248 nm KrF excimer laser, wavelength 248 nm, pulse enery up to 80 mJ, repetition rate up to 200 Hz, pulse length ~8 ns. Primarily used in laser surface treatments to date. Suitable for a diverse range of laser processing.

Research Group:

Macquarie University, Department of Physics

Contact Details:

Deb Kane