Photonic Devices Fabrication

Nanotechnology Capabilities:

Photonic Devices Laboratory at the ANU consists of a Class 1000 clean room with Class 100 yellow room. This laboratory hosts a whole suite of device fabrication facilities such as a 6" Karl Suss Mask aligner with backside alignment, spinner, e-beam evaporator, rapid thermal processor, wire-bonder, Oxford PlasmaLab 80 Plasma Enhanced Chemical Vapour Deposition (PECVD) and Reactive Ion Etching (RIE) system and a multi-target DC/RF magnetron sputter deposition system. This laboratory is widely used for fabrication of a range of optoelectronic devices such as lasers, VCSELs, waveguides, photodetectors, modulators.

Research Group:

Australian National University, Research School of Physical Sciences and Engineering, Electronic Materials Engineering

Contact Details:

Chennupati Jagadish
+61-2-6125-0363