Materials Processing Facility

Nanotechnology Capabilities:

• Access to customised Orsay Physics Focused Ion Beam Mill for nano-patterning
• Oxford Plasma lab RIE 100 ICP dry etching system
• TEPLA plasma cleaner
• Lithograph facilities (Karl Suss MA6 mask aligner)
• ExcelTeq SVG 8600 track coat/develop system
• Custom laser direct write lithography system

Research Group:

Australian National University, Research School of Physical Sciences and Engineering, Laser Physics Centre

Contact Details:

Barry Luther-Davies
(61) 0261254255
Laser Physics Centre, RSPhysSE, Australian National University, Canberra ACT 0200