ARC Nanotechnology Network

Materials Processing Facility

Nanotechnology Capabilities:

  • Access to customised Orsay Physics Focused Ion Beam Mill for nano-patterning
  • Oxford Plasma lab RIE 100 ICP dry etching system
  • TEPLA plasma cleaner
  • Lithograph facilities (Karl Suss MA6 mask aligner)
  • ExcelTeq SVG 8600 track coat/develop system
  • Custom laser direct write lithography system

Research Group:

Australian National University, Research School of Physical Sciences and Engineering, Laser Physics Centre

Contact Details:

Barry Luther-Davies
(61) 0261254255
Laser Physics Centre, RSPhysSE, Australian National University, Canberra ACT 0200