Plasma Processing Facility

Nanotechnology Capabilities:

• Plasma Etching System
• Plasma Deposition System with e-beam evaporation
• Sputter Deposition

Research Group:

Australian National University, Research School of Physical Sciences and Engineering, PRL

Contact Details:

Rod Boswell
02.61253442
Space Plasma and Plasma Processing group
PRL/RSPhysSE
ANU
Canberra, ACT, 0200