ARC Nanotechnology Network
high performance devices for power and rf microelectronics

high performance devices for power and rf microelectronics

Name of Group Leader:

Vito Raineri  

Physical Address:

Strada VIII - Zona Industriale, 5
95121 Catania






Nanotechnology Research Programs/Activities:

Nanoimprinting (hot embossing and UVNIL)and nanolitography for the fabrication of nanoscale based devices on advanced materials such as graphene, GaN/AlGaN, 3C/4H -SiC, functional oxides to fabricate power and Rf devices with superior performances. A particular attention is dedicated to power devices able to improve energetic performes (power consume reduction) and devices for environment control dedicated to safety.  

Scale of Nanotechnology Research Effort:

12 researchers
1 M annual budgets
3 PhDs per year  

Nanotechnology research facilities:

Nanoimprinting (hot embossing and UVNIL), EBL e-line by Raith, and all related support equipments for dry etching metal deposition, ... in clean room class 10 US std. Scanning probe microscopy laboratory equipped with Veeco DI3100 Nanoscope V and all electrical modules, Multimode with temperature controlled stage (-30 up to 300 C), PSIA 150. field emission TEM (200 kV by Jeol) equipped with EFTEM, STEM and others tools and capabilities for nanoelectronics.  

Collaboration Information


Group Websites: